| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a machining method for easily separating a substrate into desired shapes. <P>SOLUTION: The machining method comprises a process of arranging a mask 6 on the desired shape 2 on one face of the substrate 1; a process of separating into the substrate 1 of the desired shape 2 by jetting abrasive grains on one face of the substrate 1; a process of separating the substrate 1 from a double-sided tape 5 on a pedestal 4; and a process of jetting the abrasive grains on at least an outer peripheral part of the desired shape 2 on the other face of the substrate 1. In the substrate 1 of the desired shape 2, a solar cell device 3 is formed, the light-receiving face of the solar cell device 3 is the other face of the substrate 1, and is roughened in a process of abrasive grain jetting. <P>COPYRIGHT: (C)2004,JPO</p> |
