| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film forming device and thin film forming method for forming a thin film such as an organic thin film in a desired shape and thickness on an object to be formed such as a substrate. SOLUTION: In the thin film forming device 1, a first shadow mask 6 is made close to or in contact with the substrate 2, and a second shadow mask 7 is arranged so as to maintain a certain distance from the first shadow mask 6. In forming the organic thin film, the first shadow mask 6 is fixed, and only the second shadow mask 7 with an opening part formed is moved so that deposition material reaches to a specific group of opening parts of the first shadow mask 6. A predetermined organic thin film is formed in a predetermined region on the substrate 2 by appropriately changing positional relation between the first and second shadow masks 6, 7. In the thin film forming device 1, entering of the deposition material after the first shadow mask 6 passes is suppressed, and damage and transfer of the formed organic thin film with movement of the second shadow mask 7 is prevented. Thereby, the organic thin film of a predetermined shape and thickness is formed in the predetermined region on the substrate 2. COPYRIGHT: (C)2004,JPO
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