| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mirror device capable of adjusting inclination of a mirror without attenuating outputting light, and also to provide an optical switch, related electronic equipment and a method for driving the mirror device. <P>SOLUTION: In the mirror device, there are installed a mirror part 10 having a mirror for reflecting outputting light, rotary electrodes 21, 22 for attracting and rotating the mirror part 10 by generating a Coulomb force, position holding electrodes 11, 12 for holding the position of the mirror part 10 by generating a Coulomb force, a light projector 31 for projecting measuring light to a reflector provided on the rear face of the outputting light reflection area of the mirror, a photodetector 32 for receiving reflected light from the reflector, and a controller 33 for controlling each electrode so that the Coulomb force is adjusted based on the light receiving quantity of the photodetector 32. <P>COPYRIGHT: (C)2004,JPO</p> |
