Substrate testing apparatus, has substrate carrier to receive and hold substrate in releasable thermal contact, and directly cooled thermal radiation shield protecting substrate from thermal radiation

摘要

The apparatus has an uncooled chuck drive (2) arranged in a vacuum chamber (3). A chuck (1) is carried by the drive and thermally decoupled from the drive, and has a receiving surface to receive a test substrate. A substrate carrier receives and holds the substrate in a releasable thermal contact with the surface. A directly cooled thermal radiation shield is arranged to shield the test substrate from a thermal radiation.