| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement device and its method for OES measurement in the air. SOLUTION: Arc electrodes 201 and 501 each have an pointed end having a specific diameter and a specific cutting angle. Holding means 202 and 502 hold arc power sources 201 and 501 at a specific distance from a material to be measured. A voltage and current supply source 203 generates and keeps a voltage between the arc electrode and the material to be measured to feed a current into the arc. A convergence and detection optical system 205 or the like collects and detects light emission. The diameters of the arc electrodes 201 and 501 are 3-10 mm, and the cutting angles thereof are 50-130°. The convergence and detection optical system 205 or the like collects and detects at least light emission in the wavelength of 193 nm. COPYRIGHT: (C)2004,JPO
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