发明名称 Conformable contact masking methods and apparatus utilizing in situ cathodic activation of a substrate
摘要 Electroplating processes (e.g. conformable contact mask plating and electrochemical fabrication processes) that include in situ activation of a surface onto which a deposit will be made are described. At least one material to be deposited has an effective deposition voltage that is higher than an open circuit voltage, and wherein a deposition control parameter is capable of being set to such a value that a voltage can be controlled to a value between the effective deposition voltage and the open circuit voltage such that no significant deposition occurs but such that surface activation of at least a portion of the substrate can occur. After making electrical contact between an anode, that comprises the at least one material, and the substrate via a plating solution, applying a voltage or current to activate the surface without any significant deposition occurring, and thereafter without breaking the electrical contact, causing deposition to occur.
申请公布号 US2004065555(A1) 申请公布日期 2004.04.08
申请号 US20030434289 申请日期 2003.05.07
申请人 UNIVERSITY OF SOUTHERN CALIFORNIA 发明人 ZHANG GANG
分类号 C25D1/00;C25D5/02;C25D5/10;C25D5/12;C25D5/14;C25D5/18;C25D5/34;C25D5/40;C25D5/48;C25D5/50;H01L21/288;H01L21/768;H05K3/24;(IPC1-7):C25D5/02 主分类号 C25D1/00
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