| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting unit which facilitates mounting and demounting even of large quantities of objects to be treated and has a long service life. SOLUTION: In the mounting unit for the objects to be treated, a plurality of objects to be treated having a through hole can be fixed to a mounting plate. The mounting plate is provided with a plurality of grip members and the objects to be treated are made freely fixable to the mounting plate with fixing pins freely attachable to and detachable from the grip members. COPYRIGHT: (C)2004,JPO
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