| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate holding apparatus capable of securely holding even a small-sized substrate with a uniform force and a component mounting apparatus mounted with the same. <P>SOLUTION: The apparatus is equipped with a support plate 124 which is arranged below a couple of conveyance rails 114a and 114b freely varied in inter-rail width by a rail width varying means and abuts against push-up parts 18a and 18b of the conveyance rails 114a and 114b and a plate elevating means 14 which elevates the support plate 124 by arranging a plurality of driving force operation points (corresponding to 40a and 40b) to the support plate 124 at different positions in the inter-rail width direction of the couple of conveyance rails 114a and 114b, at least one driving force operation point of the plate elevating means 14 being always in the area between the push-up parts 18a and 18b of the couple of conveyance rails 114a and 114b in the inter-rail width direction. <P>COPYRIGHT: (C)2004,JPO |
