| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a homogeneous ferrite film having high magnetic permeability due to the controlled crystalline orientation. <P>SOLUTION: This method for forming the ferrite film on a substrate 4 having an arithmetic mean roughness Ra of more than 0 but 10 μm or less with the use of a ferrite-film-forming apparatus, is characterized by repeating treatments of removing the solution supplied to the substrate 4 through a nozzle 1 with a centrifugal force due to rotation of a rotation anvil 3, and then removing the solution supplied to the substrate 4 through a nozzle 2 with the centrifugal force due to rotation of the rotation anvil 3, when solutions stored in oil tanks 5 and 6 necessary for plating are supplied to each substrate 4 through the nozzles 2 and 1. Thus, formed ferrite film has a ratio of peak intensities I<SB>222</SB>/I<SB>311</SB>of more than 0.05, which corresponds to the intensity of a crystal lattice face (222) to that of a crystal lattice face (311) in an X-ray diffraction pattern on the film surface, and contains at least one element among Ni, Zn, Fe and O. <P>COPYRIGHT: (C)2004,JPO |
