LIQUID DROP EJECTING HEAD AND ITS MANUFACTURING PROCESS, INK CARTRIDGE, INKJET RECORDER, ELECTROSTATIC ACTUATOR, MICROPUMP, AND OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To solve a problem that a gap required for low voltage driving cannot be formed easily. SOLUTION: An actuator substrate 11 comprises a diaphragm 22 formed on a base substrate 21, and a counter electrode 24 facing the diaphragm 22 through a gap 23 formed by etching a sacrifice layer. An insulating film 27 formed on the surface of the counter electrode 24 and a surface insulation film 22c constituting the diaphragm 22 have a thick central part and a thin peripheral part in the region of the gap 23. COPYRIGHT: (C)2004,JPO