Interferometric measuring device

摘要

An interferometric measuring device for measuring surface characteristics, shapes, distances, and changes in distance, for example vibrations, of measurement objects (7) has a probe section (6). An advantageous design with respect to ease of use and error-free scanning is provided by the fact that the probe section (6) is subdivided into a fixed probe section (6.1) and a rotatable probe section (6.2) mechanically and optically coupled thereto, and that a beam splitter (6.3; 6.3') is situated in the rotatable probe section (6.2) for creating a reference beam and a measuring beam for the interferometric measurement (FIG. 1).