| 摘要 |
PROBLEM TO BE SOLVED: To increase the speed of the dropping operation of a liquid substance and to enhance productivity. SOLUTION: A liquid substance dropping apparatus 10 is equipped with a liquid substance supply device 20, which is equipped with a liquid substance storing container 40, a means (take-out port 21) for taking out the liquid substance corresponding to the dripping amount from the container 40, a means (storage chamber 22) for temporarily storing the taken-out liquid substance and a means (discharge port 23) for discharging the liquid substance taken out to be stored, and a moving device 12 for relatively moving a substrate 1. COPYRIGHT: (C)2004,JPO
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