发明名称 |
Transfer chamber for vacuum processing system |
摘要 |
A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate between the processing chamber and the load lock chamber. A lid couples to and seals a top of the main body of the transfer chamber. The transfer chamber also has a domed bottom adapted to couple to and to seal a bottom portion of the main body of the transfer chamber.
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申请公布号 |
US2004055537(A1) |
申请公布日期 |
2004.03.25 |
申请号 |
US20030601185 |
申请日期 |
2003.06.20 |
申请人 |
KURITA SHINICHI;BEER EMANUEL;NGUYEN HUNG T.;BLONIGAN WENDELL T. |
发明人 |
KURITA SHINICHI;BEER EMANUEL;NGUYEN HUNG T.;BLONIGAN WENDELL T. |
分类号 |
C23C14/56;C23C16/54;H01L21/00;H01L21/02;H01L21/205;H01L21/677;(IPC1-7):C23C16/00 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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