COATING METHOD, COATING APPARATUS AND MANUFACTURING METHOD OF PATTERN MEMBER USING BELT-LIKE FLEXIBLE BASE MATERIAL HAVING COATED FILM FORMED BY THE METHOD AND APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a coating method and apparatus which can produce a smooth-surfaced coating film with an extremely thin thickness and high precision of thickness.

SOLUTION: In the coating method, the coating film 28 of a prescribed film thickness is formed on a belt-like flexible base material 12 continuously conveyed with a prescribed space between the material and coating head 18 while supplying the coating liquid from a slit 18C of the coating head 18. Therein, the average flow rate of the coating liquid in the slit of the coating head is 100∼500mm/sec, the film thickness of the coating film 28 just after coating is 2∼40μm and the belt-like flexible base material 12 is horizontally supported within 0.5sec after coating.

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