| 摘要 |
An object of the present invention is to provide a method for manufacturing ink jet recording heads by simple and inexpensive means. In order to realize this object, the present invention forms thin film piezoelectric elements using the so-called transfer method, and joining these to a pressure chamber plate. First, a forming plate 8 is prepared beforehand, provided with concavities 82 corresponding to the shapes of thin film piezoelectric elements 5, and upper electrodes 4 and a piezoelectric film 3 are formed as films inside the concavities 82. Then either a lower electrode or a vibration plate 2 is formed so as to cover the piezoelectric film 3, and the thin film piezoelectric elements 5 are fabricated. A substrate 1 constituting a pressure chamber plate is joined to the thin film piezoelectric elements 5, and the thin film piezoelectric elements 5 are removed from the forming plate 8. The substrate 1 is etched to form pressure chambers 11, and a nozzle plate 6 is joined thereto, whereupon the ink jet recording head is manufactured.
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