| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an application for maintenance which can prevent the breakdown of a vacuum pump due to an operating error by a worker during the maintenance of the vacuum pump and can shorten the working hours of the maintenance of the vacuum pump, and to provide a maintenance device for mounting maintenance application. <P>SOLUTION: The maintenance work of a turbo-molecular pump body 100 and a control device is performed with the maintenance device connected to the turbo-molecular pump body 100 or the control device.In addition, during the maintenance work, the result of searching parameter information and the input result of the parameter information are converted into data, which are recorded in the maintenance device. The data recorded in the maintenance device are then encrypted, and the encrypted data are stored in the maintenance device or an external device thereof. The stored instruction is used by a person who performs subsequent maintenance work, and the worker reproduces the instruction to perform the maintenance work. <P>COPYRIGHT: (C)2004,JPO |
