| 摘要 |
PROBLEM TO BE SOLVED: To realize a laminate wherein an adhesion layer having a wide application range and an excellent adhesion property is used. SOLUTION: An adhesion layer containing amorphous carbon nitride (a-CNx:H) is formed on a laminate comprising an organic material formed on an inorganic material, an interface between an organic material and an inorganic material in a laminate wherein the organic material is formed on the inorganic material and the interface between an adhesive and a substrate hardly adhesive to the adhesive. The amorphous carbon nitride film is made of a material having carbon as a main component, good in wetting properties and high also in adhesion properties. Since a density of the film is high, van der Waals' forces acting between it and the inorganic material is strong, a chemical bonding force to the inorganic material is increased by nitrogen atoms existing in the film and adhesion properties to the inorganic material are also high. By adopting this material as the adhesion layer, the adhesion property of the laminate can be improved. COPYRIGHT: (C)2004,JPO
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