Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation,申请号GB20020007952-传众专利搜索

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发明名称	Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
摘要
申请公布号	GB2371363(B)	申请公布日期	2004.03.03
申请号	GB20020007952	申请日期	2000.09.07
申请人		发明人
分类号	G01C19/56;H01L29/84;(IPC1-7):G01C19/00	主分类号	G01C19/56
代理机构		代理人
主权项
地址

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