| 摘要 |
PURPOSE:To secure a vacuum bearing device that leaks no lubricant consisting of Ga or a Ga alloy. CONSTITUTION:A Ga ion is poured into two race parts 1a, 1b of an outer ring 1 and an inner ring 2 consisting of Ta, W, Mo or a Mo alloy. Likewise this Ga ion is poured onto the surface of a ball 3 consisting of Ta, W Mo or the Mo alloy as well. A lubricant 4 consisting of Ga or the Ga alloy is good in wettability in relation to the race parts 1a, 2a poured with this ion and the surface of the ball 3, through which the lubricant 4 is preventable from leaking to the outside for a long period of time. |
