发明名称 ACHROMATIC FRESNEL OPTICS FOR ULTRAVIOLET AND X-RAY RADIATION
摘要 An achromatic Fresnel optic that combines a Fresnel zone plate and a refractive Fresnel lens. The zone plate provides high resolution for imaging and focusing, while the refractive lens takes advantage of the refraction index change properties of appropriate elements near absorption edges to recombine the electromagnetic radiation of different energies dispersed by the zone plate. This compound lens effectively solves the high chromatic aberration problem of zone plates. The AFO has a wide range of potential applications in lithography, microimaging with various contrast mechanisms and measurement techniques.
申请公布号 WO03042728(A8) 申请公布日期 2004.02.26
申请号 WO2002US35517 申请日期 2002.11.04
申请人 XRADIA, INC.;YUN, WENBING;WANG, YUXIN 发明人 YUN, WENBING;WANG, YUXIN
分类号 G02B3/08;G02B27/44;G03F7/20;(IPC1-7):G02B5/18 主分类号 G02B3/08
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