| 发明名称 |
Holographic lithography in three-dimensional photo lacquer body, employs multi-faced optical entry element, having planar- or curved surfaces |
| 摘要 |
The optical element (3) has multiple areas with planar- or curved surfaces. An Independent claim is included for the photo lacquer structure so produced.
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| 申请公布号 |
DE10332651(A1) |
申请公布日期 |
2004.02.26 |
| 申请号 |
DE20031032651 |
申请日期 |
2003.07.18 |
| 申请人 |
FORSCHUNGSZENTRUM KARLSRUHE GMBH |
发明人 |
MEISEL, DANIEL;MIKLIAEV, IOURI;WEGENER, MARTIN |
| 分类号 |
G02B5/18;G02B6/12;G02B6/122;G03F7/20;G03F7/26;G03H1/02;G03H1/04;H01L21/027;(IPC1-7):G03F7/20 |
主分类号 |
G02B5/18 |
| 代理机构 |
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