发明名称 |
Abrasive machine |
摘要 |
The abrasive machine of the present invention is capable of controlling a shape of an abrasive face of a small abrasive plate. The abrasive machine comprises: a plate holder holding an abrasive plate; a fixed engaging member being fixed to the plate holder and engaging with the abrasive plate; a first O-ring being provided between the fixed engaging member and the abrasive plate; a second O-ring being provided between the plate holder and the abrasive plate; and a fluid supply-discharge mechanism for supplying a fluid to and discharging the same from a zone enclosed by the abrasive plate, the plate holder and the second O-ring. An outer circumferential face of the abrasive plate is separated from an inner circumferential face of the fixed engaging member. |
申请公布号 |
US6692341(B2) |
申请公布日期 |
2004.02.17 |
申请号 |
US20020136578 |
申请日期 |
2002.04.25 |
申请人 |
FUJIKOSHI MACHINERY CORP. |
发明人 |
KISHIDA HIROMI;NAKAMURA YOSHIO;ONISHI SUSUMU |
分类号 |
B24B37/04;B24B7/22;B24B37/12;B24B45/00;H01L21/304;(IPC1-7):B24B7/22 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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