发明名称 Abrasive machine
摘要 The abrasive machine of the present invention is capable of controlling a shape of an abrasive face of a small abrasive plate. The abrasive machine comprises: a plate holder holding an abrasive plate; a fixed engaging member being fixed to the plate holder and engaging with the abrasive plate; a first O-ring being provided between the fixed engaging member and the abrasive plate; a second O-ring being provided between the plate holder and the abrasive plate; and a fluid supply-discharge mechanism for supplying a fluid to and discharging the same from a zone enclosed by the abrasive plate, the plate holder and the second O-ring. An outer circumferential face of the abrasive plate is separated from an inner circumferential face of the fixed engaging member.
申请公布号 US6692341(B2) 申请公布日期 2004.02.17
申请号 US20020136578 申请日期 2002.04.25
申请人 FUJIKOSHI MACHINERY CORP. 发明人 KISHIDA HIROMI;NAKAMURA YOSHIO;ONISHI SUSUMU
分类号 B24B37/04;B24B7/22;B24B37/12;B24B45/00;H01L21/304;(IPC1-7):B24B7/22 主分类号 B24B37/04
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