| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical switch which can be made small-sized and low-cost. SOLUTION: A MEMS (micro electromechanical system) optical switch has microlens arrays 10 and 12 as lenses for collimation, an input-side optical fiber 14, an output-side optical fiber 16, a mirror 17, and a substrate 18. The microlens arrays 10 and 12 are constituted by arranging and connecting in array a plurality of lens parts 2 comprising diffraction optical elements which are made of silicon substrates and formed by etching. COPYRIGHT: (C)2004,JPO |
