METHOD OF MANUFACTURING LAMINATED STRUCTURE FOR DISK DRIVE SUSPENSION ASSEMBLY, AND THE LAMINATED STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a laminated structure for a disk drive suspension assembly, which is improved in machining precision and excellent in quality. SOLUTION: In the metod of manufacturing the laminated structure for the disk drive suspension assembly, wet etching is applied to form first and third layers by using a multilayered sheet at least including a first layer made of a metal spring material, a second middle layer made of an electric insulating material, and a third layer made of a conductive material, and then the pattern formation of the second layer is executed by the etching processes of three kinds or more including continuous wet etching using at least two or more kinds of different etching solutions, and dry etching carried out after the wet etching. COPYRIGHT: (C)2004,JPO