| 摘要 |
PROBLEM TO BE SOLVED: To provide a birefringence measuring device that simply, quickly and precisely measures birefringence characteristics of a measured object in an ultraviolet range, a heat treatment method and a strain removing device that can shorten heat treatment time and control birefringence magnitude in a heat treatment process of an optical member, and an exposing device that is mounted with a polarization state detecting device comprising the birefringence measuring device. SOLUTION: The birefringence measuring device has a light source, a polarizing element 102 for extracting a light flux in a particular polarization direction, a measured object, a sample stage holding the measured object, controlling means controlling the sample stage, light flux dividing means for dividing a light flux outgoing from the measured object into two light fluxes having the same polarization state as the former, two polarizing elements for extracting light fluxes in particular polarization directions from the light fluxes after the division by the light flux dividing means, two light quantity detecting means for detecting the light quantities of the light fluxes through the polarizing elements, and arithmetic means for arithmetically processing the received light quantities of the light quantity detecting means; and computes information on the polarization state of the light flux outgoing from the measured object. COPYRIGHT: (C)2004,JPO
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