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发明名称
摘要
申请公布号
JP3493289(B2)
申请公布日期
2004.02.03
申请号
JP19970284850
申请日期
1997.10.17
申请人
发明人
分类号
H01L21/762;H01L21/02;H01L21/76;H01L27/12;(IPC1-7):H01L21/762
主分类号
H01L21/762
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