| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an ink jet head which can draw highly precisely and has a good high frequency driving characteristics, and to provide the ink jet head. SOLUTION: In the manufacturing method of the ink jet head equipped with a chamber substrate 2 including pressure chambers 6 which are formed at both surfaces to be ink passages and use one side of the passages; an ink chamber 7 for providing ink to the pressure chambers 6; and perforations 8 which connect the passages of both faces, a diaphragm substrate 4 put on one surface of the chamber substrate 2 for applying a pressure to the ink in the pressure chambers 6, and an orifice substrate 3 having orifices 10 for firing the pressured ink; a dry etching is carried out to both surfaces of the chamber substrate 2 with plasma reactive ions, whereby the passages of both surfaces of the chamber substrate, the pressure chambers 6, the perforations 8 which connect the passages of both surfaces and the ink chamber 7 are formed. COPYRIGHT: (C)2004,JPO
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