| 摘要 |
PROBLEM TO BE SOLVED: To achieve an XY stage for electron microscopes having a small precision decrease also to the distortion of a base by achieving a high-magnification observation in a light and simple structure. SOLUTION: On the XY stage for electron microscopes, a wafer table is supported on a horizontal guidance surface by three two-dimensional ultrasonic motors having a wafer table, and the wafer table is connected to the edge section of the base by a linking mechanism so that the wafer table can make only a parallel movement without accompanying any rotations. COPYRIGHT: (C)2004,JPO |
