SURFACE CORRECTION METHOD OF POLISHING SURFACE PLATE AND SURFACE CORRECTION MATERIAL USED FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a surface correction method of a polishing surface plate and a surface correction material for it in the case of polishing a polished material with the polishing surface plate using polishing compact mainly consisting of inorganic grains.

SOLUTION: The surface correction method of the polishing surface plate and the surface correction material for it are used arranging a member made of a predetermined material on a part or a whole surface with respect to the correction of the correction material used for the surface correction, and adding correction fluid by mutually carrying out abrasive movement of the polishing surface plate and/or the surface correction material.

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