发明名称 APPARATUS AND METHOD FOR CONVEYING LARGE-SIZED SHEET MATERIAL
摘要 PROBLEM TO BE SOLVED: To remarkably increase a conveying efficiency by increasing the number of sheets of large-sized sheet materials transportable at a time while holding the cleanliness thereof. SOLUTION: In this conveying apparatus 1 for the large-sized sheet materials having a plurality of racks 2 arranged in the casing thereof for storing the large-sized sheet materials 3 between the racks 2, a large number of air jetting holes are provided in the upper surfaces of the racks 2, and air is fed into air flow passages for conducting air to the air jetting holes to float the thin sheet materials by the air so that the thin sheet materials can be retrieved from and stored into the casing. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004026495(A) 申请公布日期 2004.01.29
申请号 JP20020337631 申请日期 2002.11.21
申请人 CORNING JAPAN KK;CHIKUMA TEKKOSHO:KK 发明人 SAKURAI TAKASHI;CHIKUMA YUZURU
分类号 B65G1/00;B65G49/06;H01L21/677;H01L21/68;(IPC1-7):B65G49/06 主分类号 B65G1/00
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