发明名称 Direct bonding of small parts and module of combined small parts without an intermediate layer inbetween
摘要 A groove having a V-shaped section is provided on a bonding surface of an IC chip being as a first small part, while an elongate projection having a V-shaped section to engage with the groove of the first IC chip is provided on a corresponding portion of a bonding surface of an IC chip being as a second small part. Then, the IC chips are bonded together by the action of a holding force resulting from fitting the elongate protection of the second IC chip to the groove of the first IC chip, together with a bonding force produced between the bonding surfaces by interatomic force and metallic bond.
申请公布号 US6683376(B2) 申请公布日期 2004.01.27
申请号 US19990297288 申请日期 1999.04.29
申请人 FANUC LTD. 发明人 SAWADA KIYOSHI;KAWAI TOMOHIKO
分类号 H01L21/98;H01L29/06;(IPC1-7):B28B204/39 主分类号 H01L21/98
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