| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a control device for a linear motor capable of high-speed positioning at a natural frequency of a base existing in the low frequency region where a band attenuating filter can not be applied. <P>SOLUTION: The control device of the linear motor comprises a sensor 13 which detects the relative position between a movable part including a movable element of the linear motor 10 and the base supporting a stator of the linear motor 10, feeds back the position information detected by the sensor 13 to a position controller 11, and also feeds back speed information obtained by differentiation or difference operation of the position information to a speed controller 12 to perform positioning. The control device of the linear motor is provided with an observer 15 as an estimation means which estimates displacement information and speed information of the base on the basis of the thrust command f output from the speed controller 12 and the position information x detected by the sensor 13. The displacement information and the speed information of the base estimated by the observer 15 are added to the thrust command f. <P>COPYRIGHT: (C)2004,JPO |
