发明名称 RESISTOR AND TRIMMING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To trim a resistor with fine-adjustment for properly suppressing variations in the resistance within a reduced area for the trimming. SOLUTION: The resistance is roughly adjusted by applying the serpentine cut laser trimming to the resistor 10 to form a plurality of first cut parts 11 alternately cut from both sides of the resistor 10 in the width direction and a second cut part for fine-adjustment of the resistance is formed in the width direction of the resistor 10 by applying laser trimming between the respective first cut parts 11. The fine-adjustment range of resistance changesΔR can be estimated by changing an intervalΔW between the first cut parts 11 and the second cut parts 12. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004014697(A) 申请公布日期 2004.01.15
申请号 JP20020164397 申请日期 2002.06.05
申请人 DENSO CORP 发明人 AOKI MITSURU;FUTAMURA SUMIJI
分类号 H01L27/04;H01C17/242;H01L21/822;(IPC1-7):H01L21/822 主分类号 H01L27/04
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