| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction chuck which can prevent contaminants from adhering to the suction surface, etc. and increase a processability, etc. on a workpiece. SOLUTION: A conductive DLC coating is applied to the whole surface of a ceramic main body 18 of a vacuum chuck 17, namely a suction surface K, a non-suction surface H, and a side surface (outer peripheral surface) 35. Thus, a coating layer 37 is formed on the whole surface. In this coating layer 37, the Vickers hardness Hv is 3,000 or more, the volume resistivityρis 10<SP>-6</SP>Ωcm or less, the coefficient of dynamic frictionμis less than 0.2, and the color tone is that the lightness is 5.0 or less and the chroma is 2.5 or less (for example, a gray) in all chromatic colors. COPYRIGHT: (C)2004,JPO |
