| 摘要 |
PROBLEM TO BE SOLVED: To provide an ITO film, which sufficiently prevents transmission of water vapor, and its manufacturing method, as well as an organic EL element including the ITO film. SOLUTION: The organic EL element 10 comprises a substrate 12, an anode 14, a main body of the element, and a cathode, layered on the substrate in order. The substrate 12 is a board or a film of resin and the anode 14 is an ITO film made of two layers: a first layer 22 and second layer 20 on the first layer formed on the substrate 12. The first layer 22 has a low-crystallized structure and the second layer 20 has a high-crystallized structure. COPYRIGHT: (C)2004,JPO
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