| 摘要 |
A stage apparatus includes a table disposed above a base table so as to oppose to the base table, an X-axis-direction table support mechanism portion disposed between the base and the table for supporting the table in a state that the table is capable of moving in an X-axis-direction within a two-dimensional plane, a Y-axis-direction table support mechanism portion disposed between the base and the table for supporting the table in a state that the table is capable of moving in a Y-axis-direction within a two-dimensional plane, an X-axis-direction linear guide portion formed on an upper surface of the base and extending in the X-axis-direction, a Y-axis-direction linear guide portion formed on the upper surface of the base and extending in the Y-axis-direction, an X-axis direction movable member provided so as to move along the X-axis-direction linear guide portion and connected to the Y-axis-direction table support mechanism portion, a Y-axis-direction movable member provided so as to move along the Y-axis-direction linear guide portion and connected to the X-axis-direction table support mechanism portion, an X-axis-direction straight drive mechanism fixed to the base for driving the X-axis-direction movable member, and a Y-axis-direction straight drive mechanism fixed to the base for driving the Y-axis-direction movable member. The X-axis-direction linear guide portion and the Y-axis-direction linear guide portion are arranged in a rectangular cross positional relation forming a roughly "+" shape.
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