Method for manufacturing ink-jet printhead having hemispherical ink chamber

摘要

A method for manufacturing an ink-jet printhead having a hemispherical ink chamber, wherein a nozzle plate is formed on a surface of substrate; a heater is formed on the nozzle plate; a manifold for supplying ink; an electrode is formed on the nozzle plate to be electrically connected to the heater; a nozzle is formed by etching the nozzle plate inside the heater; a groove for forming an ink channel is formed to expose the substrate so that the groove extends from the outside of the heater toward the manifold; an ink chamber is formed to have a diameter greater than the diameter of the heater and be hemispherical by etching the substrate exposed by the nozzle; an ink channel is formed to be in flow communication with the ink chamber and the manifold; and the groove is closed by forming a material layer on the nozzle plate.