ONE-DIMENSIONAL BEAM-CONDENSING OPTICAL SYSTEM, ILLUMINATION OPTICAL SYSTEM FOR CORRECTING DISTRIBUTION OF QUANTITY OF LIGHT, AND EXPOSURE HEAD

摘要

PROBLEM TO BE SOLVED: To form a line image or illumination light appoximately uniformized in the distribution of the quantity of light without lowering of the efficiency of utilizing the light and to perform proper exposure by using the line image or illumination light. SOLUTION: The light from a light source 11 is collimated into parallel luminous fluxes by the effect of a collimator lens 12 and is made incident on an optical system 13 for correcting the distribution of the quantity of light. The optical system 13 changes the widths of the luminous fluxes in the respective exit positions of the parallel luminous fluxes so as to make the distribution of the quantity of light uniform when the parallel luminous fluxes are made into the line image 15. The luminous flux in the central part where the distribution of the quantity of light is normally large can effectively be utilized for the peripheral part where the quantity of light is insufficient by changing the widths of the luminous fluxes, thereby uniforming the distribution of the quantity of light of the line image 15 without lowering of the efficiency of utilizing the light as a whole. COPYRIGHT: (C)2004,JPO