发明名称 |
Ultraviolet-light irradiation apparatus |
摘要 |
Irradiation lamps of an ultraviolet-light irradiation apparatus are uniformly cooled to achieve an appropriate temperature of the walls of the lamps and the ultraviolet light emitted from the lamps is efficiently reflected toward an object to be irradiated so that the ultraviolet light is efficiently irradiated onto the object to be irradiated. A plurality of low-pressure mercury lamps are arranged in parallel. A reflective mirror is arranged above the low-pressure mercury lamps so as to reflect the ultraviolet light emitted by the low-pressure mercury lamps. An exhaust passage defined by the reflective mirror suctions air around the low-pressure mercury lamps and exhausts the suctioned air to outside. The reflective mirror has a plurality of openings arranged along a longitudinal direction of the low-pressure mercury lamps, and a part of the openings has a size different from a size of other parts of the openings.
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申请公布号 |
US6670616(B2) |
申请公布日期 |
2003.12.30 |
申请号 |
US20020103557 |
申请日期 |
2002.03.22 |
申请人 |
FUJITSU AMD SEMICONDUCTOR LIMITED |
发明人 |
KIKUCHI KENJI |
分类号 |
H01L21/302;G03F7/20;H01L21/00;H01L21/3065;(IPC1-7):G01J23/00;H01K1/58;H01K3/22 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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