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发明名称
APPARATUS AND METHOD FOR CASSETTE-LESS TRANSFER OF WAFERS
摘要
申请公布号
AU2003273852(A1)
申请公布日期
2003.12.22
申请号
AU20030273852
申请日期
2003.06.09
申请人
AKRION, LLC
发明人
EDWARD, R. FIX;MICHAEL, J. VASHRO;DOUGLAS, R. FARNLUND;SVEN EVERS;TODD, C. MOHLER
分类号
H01L21/677;H01L21/687
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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