发明名称 |
Optical micro systems |
摘要 |
A method for fabricating optical MEMS (optical Micro-Electro-Mechanical Systems or Micro-Opto-Electro-Mechanical Systems (MOEMS)) is described. The basic process involves deposition and patterning of a sacrificial spacer layer and a combined moulding and photolithography step. <??>The method described allows the fabrication of micromechanical elements incorporating micro-optical structures such as lenses (diffractive or refractive), gratings (for polarisers or resonant filters), waveguides or other micro-optical relief structures fabricated by UV-curing replication processes. <IMAGE> |
申请公布号 |
EP1371605(A2) |
申请公布日期 |
2003.12.17 |
申请号 |
EP20030253704 |
申请日期 |
2003.06.11 |
申请人 |
C.S.E.M. CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA |
发明人 |
GALE, MICHAEL THOMAS;OBI, SAMUEL |
分类号 |
B81B3/00;B81C1/00;(IPC1-7):B81C1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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地址 |
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