METHOD OF OBTAINING 3-D COORDINATES

摘要

A method of obtaining 3-D coordinates in a 3-D shape measuring device having a manual XY table (12) provided to a measuring microscope having an optical system and an auto-focus unit (11d), wherein the manual XY table (12) sets in advance a plurality of areas on an XY plane on which the XY table (12) can move, the XY coordinates of the XY table (12) on the XY plane are read at specified time intervals, and, if the read XY coordinates belong to the plurality of areas, the auto-focus unit (11d) is allowed to make auto-focusing to obtain 3-D coordinates at focusing.