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发明名称
摘要
申请公布号
FR2024891(A2)
申请公布日期
1970.09.04
申请号
FR19690035953
申请日期
1969.10.15
申请人
IBM
发明人
分类号
D06F15/00;H01J9/233;H01L21/00;H01L21/32;H01L21/82;(IPC1-7):H01L7/00;H01L19/00
主分类号
D06F15/00
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