ANTI-REFLECTIVE COATING MATERIAL, SEMICONDUCTOR PRODUCT WITH AN ARC LAYER AND METHODS,申请号EP20020724164-传众专利搜索

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发明名称	ANTI-REFLECTIVE COATING MATERIAL, SEMICONDUCTOR PRODUCT WITH AN ARC LAYER AND METHODS
摘要
申请公布号	EP1368709(A2)	申请公布日期	2003.12.10
申请号	EP20020724164	申请日期	2002.02.13
申请人	INFINEON TECHNOLOGIES SC300 GMBH & CO. KG	发明人	HORNIG, STEFFEN;GANZ, DIETMAR
分类号	G03F7/11;G02B1/11;G03F7/004;G03F7/09;H01L21/027;(IPC1-7):G03F7/09	主分类号	G03F7/11
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