| 摘要 |
PROBLEM TO BE SOLVED: To provide a cathode for a cooling type high quantum efficiency photocathode electron ray source, which is higher in cooling efficiency and can more stably emit a large amount of electrons. SOLUTION: A tip portion (6) of a cathode composed of a substance high in thermal conductivity and electric conductivity is arranged between a combination of substances (4), (5) high in Peltier cooling efficiency in a state pointed at an end thereof and joined to the respective substances (4), (5) of the combination high in Peltier cooling efficiency. COPYRIGHT: (C)2004,JPO
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