| 摘要 |
PROBLEM TO BE SOLVED: To stably ignite a plasma by arranging a mouth side electrode being opposite to a container side electrode on the outside of the container, to retain the discharge, and at the same time, to prevent dust from adhering to the mouth side electrode. SOLUTION: The container side electrode forming one part of a decompression chamber which houses a plastic container, and the mouth side electrode arranged above the opening of the plastic container are confronted with each other through an insulating body which forms one part of the decompression chamber. At the same time, a material gas-introducing pipe made of an insulating material which introduces a material gas fed to the decompression chamber by a material gas-feeding means which feeds the material gas for coating a DLC film on the internal wall surface of the plastic container by forming the material gas into a plasma to the inside of the plastic container is provided in the decompression chamber. An exhausting means which exhausts the gas in the decompression chamber from the top of the opening of the plastic container is provided. Also, a high frequency-feeding means which feeds a high frequency to the container side electrode is connected. COPYRIGHT: (C)2004,JPO
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