| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic recording medium capable of maintaining high reliability even in a server condition. SOLUTION: The magnetic recording medium includes a ferromagnetic metal thin film, a hard carbon film, and a lubricant layer formed on the surface of an electrical insulating film in this order and a back-coating layer formed on the back of the electrical insulating film and has≤200 pieces dropout value and≥10 min still life. The method includes bringing the ferromagnetic metal thin film into contact with outer most layers of resistance rollers (10 and 11) each including a cylindrical conductive shaft, an innermost layer, and the outermost layer, wherein a portion that is formed around the conductive shaft and defined between the innermost layer and the outermost layer has a resistance gradient in its thickness direction so that a resistance is low on the innermost layer side and high on the outermost layer side, supplying a reactant gas of hydrocarbon to a decompression chamber (12) while applying a voltage to the conductive shaft of the resistance roller (10 and 11), and forming the hard carbon film on the surface of the ferromagnetic metal thin film by plasma CVD. COPYRIGHT: (C)2004,JPO
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