| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner for flexibly creating a periodic maintenance schedule of the exposure by enabling changes of the schedule even after the maintenance schedule is determined. SOLUTION: The semiconductor aligner comprises a means for setting an allowable value in maintenance performance and a plan when a maintenance menu is prepared, a means for storing a set maintenance allowable value, a means for setting the maintenance schedule, a means for displaying the maintenance schedule, and a means for recalculating the schedule by using a maintenance planned day and the maintenance allowable value even after the maintenance schedule is determined. The maintenance planned day can be moved. COPYRIGHT: (C)2004,JPO
|
