A DEVICE FOR MEASURING IN THREE DIMENSIONS A TOPOGRAPHICAL SHAPE OF AN OBJECT
摘要
A device for measuring in three dimensions a topographical shape of an object. The device comprises an arrayed confocal imaging system having a confocal topographical mask provided for converting light produced by a light source into an array of small spots. The mask being mounted on a scanning member provided for moving the mask over successive positions over a predetermined distance. The device further comprises a confocal objective provided for mapping at successive object-position-in-focus the array of small spots output at said successive positions. The confocal objective may be mounted at a fixed position within said device.
申请公布号
WO03098148(A1)
申请公布日期
2003.11.27
申请号
WO2003BE00083
申请日期
2003.05.15
申请人
ICOS VISION SYSTEMS N.V.;ZABOLITZKY, JOHN;SMETS, CARL;VERLUYTEN, LUDO;SMEYERS, AUGUST
发明人
ZABOLITZKY, JOHN;SMETS, CARL;VERLUYTEN, LUDO;SMEYERS, AUGUST