Liquid material evaporation supply apparatus

摘要

A liquid material evaporation supply apparatus is provided with a material tank which accommodates a liquid material heated to generate a predetermined gas, a liquid material supply pipe for supplying the liquid material to the material tank, and a gas discharge pipe for discharging the gas generated in the material tank. A heating device for heating exclusively the material tank is provided on the material tank. A preheat device preheats the liquid material that supplied to the material tank and a liquid flow regulation device for regulating the flow rate of the liquid material that is to be supplied to the material tank is also heated. A gas flow meter connected to the gas discharge pipe is also heated whereby a thermostatic chamber is not required.